Slightly negative surface potential and charging model of insulator in the negative-ion implantation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 127-128, Issue , 1997, Pages 278-281

  Tsuji, Hiroshi ^a   Ishikawa, Junzo ^a   Ikeda, Shigeo ^a   Gotoh, Yasuhito ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CHARGE; ELECTRON EMISSION; ION IMPLANTATION; MATHEMATICAL MODELS; SILICA;

CHARGING MODELS; NEGATIVE SURFACE POTENTIALS; SECONDARY ELECTRON ENERGY DISTRIBUTION (SEED);

ELECTRIC INSULATORS;

EID: 0031547773     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00072-4     Document Type: Article

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