High ion charge states in a high‐current, short‐pulse, vacuum arc ion source

Review of Scientific Instruments

Volumn 67, Issue 3, 1996, Pages 1202-1204

  Anders, André ^a   Brown, Ian ^a   Macgill, Robert ^a   Dickinson, Michael ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

BEAM EXTRACTION; CHARGE STATES; ELECTRIC DISCHARGES; ION SOURCES; KILO AMP BEAM CURRENTS; MULTICHARGED IONS; SAHA EQUATION; TITANIUM IONS; TUNGSTEN IONS; VACUUM SYSTEMS

Indexed keywords

EID: 0000986162     PISSN: 00346748     EISSN: 10897623     Source Type: Journal    
DOI: 10.1063/1.1146731     Document Type: Conference Paper

References (23)

1. I. G. Brown, Rev. Sci. Instrum. 65, 3081 (1994).RSINAK
2. I. G. Brown, in The Physics and Technology of Ion Sources, edited by I. G. Brown (Wiley, New York, 1989), 331.
3. I. G. Brown and X. Godechot, IEEE Trans. Plasma Sci. PS-19, 713 (1991).ITPSBD
4. I. G. Brown, B. Feinberg, and J. E. Galvin, J. Appl. Phys. 63, 4889 (1988).JAPIAU
5. J. E. Galvin, I. G. Brown, and R. A. MacGill, Rev. Sci. Instrum. 61, 583 (1990).RSINAK
6. A. Anders, S. Anders, B. Jüttner, and I. G. Brown, IEEE Trans. Plasma Sci. PS-21, 305 (1993).ITPSBD
7. E. M. Oks, I. G. Brown, M. R. Dickinson, R. A. MacGill, H. Emig, P. Spätke, and B. H. Wolf, Appl. Phys. Lett. 67, 200 (1995).APPLAB
8. E. M. Oks, I. G. Brown, M. R. Dickinson, and R. A. MacGill, Rev. Sci. Instrum. (to be published).
9. F. J. Paoloni and I. G. Brown, Rev. Sci. Instrum. 66, 3855 (1995).RSINAK
10. R. Beier and H.-J. Kunze, Z. Phys. A 285, 347 (1978).ZPAADB
11. C. R. Negus and N. J. Peacock, J. Phys. D 12, 91 (1979).JPAPBE
12. I. G. Brown, J. E. Galvin, R. A. MacGill, and R. T. Wright, Rev. Sci. Instrum. 58, 1589 (1987).RSINAK
13. S. Anders, Contrib. Plasma Phys. 26, 416 (1986).CPPHEP
14. C. Wieckert, Contrib. Plasma Phys. 27, 309 (1987).CPPHEP
15. S. Anders, A. Anders, J. Phys. D 21, 213 (1988).JPAPBE
16. N. Radic and B. Santic, Proceedings of the XIII International Symposium on Discharges and Electrical Insulation in Vacuum, Paris, 1988, edited by J. M. Buzzi and A. Septier (unpublished), p. 217.
17. S. Anders, A. Anders, Contrib. Plasma Phys. 29, 537 (1989).CPPHEP
18. N. B. Volkov and A. Z. Nemirovsky, J. Phys. D 24, 693 (1991).JPAPBE
19. A. Anders, S. Anders, A. Förster, and I. G. Brown, Plasma Sources Sci. Technol. 1, 263 (1992).PSTEEU
20. E. M. Oks, A. Anders, I. G. Brown, M. R. Dickinson, and R. A. MacGill, IEEE Trans. Plasma Sci. (submitted).
21. T. A. Carlson, C. W. Nestor, N. Wasserman, and J. D. McDowell, Atomic Data 2, 63, (1970).
22. S. Bashkin and J. O. Stoner, Atomic Energy-Level and Grotrian Diagrams, Sulfur I-Titanium XXII (North-Holland, Amsterdam, 1978), Vol. II.
23. H.-W. Drawin and P. Felenbok, Data for Plasmas in Local Thermodynamic Equilibrium (Gauthier-Villars, Paris, 1965).