Ion beam intermixing of semiconductor heterostructures for optoelectronic applications

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 127-128, Issue , 1997, Pages 418-422

  Goldberg, R D ^a   Mitchell, I V ^a   Poole, P ^b   Labrie, D ^b   Lafontaine, H ^b   Aers, G C ^b   Williams, R ^b   Dion, M ^b   Charbonneau, S ^b   Ramanujancha, K ^c   Weatherly, G C ^c  

^a UNIVERSITY OF WESTERN ONTARIO   (Canada)

^b NATIONAL RESEARCH COUNCIL CANADA   (Canada)

^c MCMASTER UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTAL DEFECTS; DIFFUSION IN SOLIDS; ENERGY GAP; HETEROJUNCTIONS; ION BOMBARDMENT; OPTOELECTRONIC DEVICES; QUANTUM WELL LASERS; SEMICONDUCTING INDIUM PHOSPHIDE; SEMICONDUCTOR DEVICE STRUCTURES; SILICON WAFERS;

ION BEAM INTERMIXING;

SEMICONDUCTOR QUANTUM WELLS;

EID: 0031547775     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)00967-6     Document Type: Article

References (22)

1. For a review see, E. Koteles, in: Applications of Photonic Technology, eds. G.A. Lampropoulos, J. Chrostowski and R.M. Measures (Plenum Press, New York, 1985) p. 413.
2. R.C. Alferness, U. Koren, L.L. Buhl, B.I. Miller, M.G. Young, T.L. Koch, G. Raybon and C.A. Burrus, Appl. Phys. Lett. 60 (1992) 3209.
3. D. Kirillov, J.L. Merz, P.D. Dapkus and J.J. Coleman, J. Appl. Phys. 55 (1984) 1105.
4. J.D. Ralston, S. O'Brien, G.W. Wicks, L.F. Eastman, Appl. Phys. Lett. 52 (1988) 1511.
5. W.D. Laidig, N. Holonyak, Jr. M.D. Camras, K. Hess, J.J. Coleman, P.D. Dapkus and J. Bardeen, Appl. Phys. Lett. 38 (1981) 776.
6. H.H. Tan, J.S. Williams, C. Jagadish, P.T. Burke and M. Gal, Appl. Phys. Lett. 68 (1996) 2401.
7. S. Charbonneau, P.J. Poole, P.G. Piva, E.S. Koteles, J.J. He, M. Fallahi, J.P. McCaffrey, M. Buchanan, G.C. Ares, M. Dion, R.D. Goldberg and I.V. Mitchell, J. Appl. Phys. 76 (1995) 3697.
8. L.B. Allard, G.C. Aers, S. Charbonneau, T.E. Jackman, R.L. Williams, I.M. Templeton, M. Buchanan, D. Stevanovic and J. Almeida, J. Appl. Phys. 72 (1992) 422.
9. D. Labrie, H. Lafontaine, N. Rowell, S. Charbonneau, D. Houghton, R.D. Goldberg and I.V. Mitchell, Appl. Phys. Lett., in press.
10. See Ref. [12] for a list.
11. P.G. Piva, P.J. Poole, S. Charbonneau, E.S. Koteles, M. Buchanan, G. Aers, A.P. Roth, Z.R. Wasilewski, J. Beauvais and R.D. Goldberg, Superlat. Microstruct. 15 (1994) 385.
12. R.D. Goldberg, I.V. Mitchell, S. Charbonneau, P. Poole, E.S. Koteles, G. Aers and G. Weatherly, in: Proc. Materials Research Society Symposium (November, 1995), to be published.
13. J.J. He, S. Charbonneau, P.J. Poole, G.C. Aers, Y. Feng, E.S. Koteles, R.D. Goldberg and I.V. Mitchell, Appl. Phys. Lett. 69 (1996) 562.
14. P.J. Poole, S. Charbonneau, M. Dion, G.C. Aers, M. Buchanan, R.D. Goldberg and I.V. Mitchell, IEEE Photon. Lett. 8 (1996) 16.
15. S. Charbonneau, P.J. Poole, Y. Feng, G.C. Aers, M. Dion, M. Davies, R.D. Goldberg and I.V. Mitchell, Appl. Phys. Lett. 67 (1995) 2954.
16. P.J. Poole, S. Charbonneau, G.C. Aers, I.E. Jackman, M. Buchanan, M. Dion, R.D. Goldberg and I.V. Mitchell, J. Appl. Phys. 78 (1995) 2367.
17. J.P. Noël, D. Melville, T. Jones, F.R. Shepherd, C.J. Miner, N. Puetz, K. Fox, P.J. Poole, Y. Feng, E.S. Koteles, S. Charbonneau, R.D. Goldberg and I.V. Mitchell, submitted to Appl. Phys. Lett. (July 1996).
18. R.D. Goldberg, I.V. Mitchell, K. Ramanujancha, G.C. Weatherly, P. Poole and S. Charbonneau, to be published.
19. P. Poole, M. Buchanan, G. Aers, Z.R. Wasilewski, M. Dion, M. Fallahi, J.J. He, S. Charbonneau, E.S. Koteles, I.V. Mitchell and R.D. Goldberg, in: Components for Wavelength Division Multiplexing, in: Proc. SPIE 2402, ed. E.S. Koteles (1995) p. 115.
20. J.S. Williams, H.H. Tan, R.D. Goldberg, R.A. Brown and C. Jagadish, Mat. Res. Soc. Symp. Proc. 316 (1994) 15.
21. D. Labrie, G.C Aers, H. Lafontaine, R.L. Williams, S. Charbonneau, R.D. Goldberg and I.V. Mitchell, submitted to Appl. Phys. Lett. (August, 1996).
22. H. Lafontaine, D.C. Houghton, N.L. Rowell and G.C. Aers, Appl. Phys. Lett., in press.