Synthesis of silicon oxynitride by ion beam sputtering and the effects of nitrogen ion-assisted bombardment

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 127-128, Issue , 1997, Pages 369-374

  Lambrinos, M F ^a   Valizadeh, R ^a   Colligon, J S ^a  

^a UNIVERSITY OF SALFORD   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ION BEAMS; ION BOMBARDMENT; LIGHT ABSORPTION; MOLECULAR VIBRATIONS; NITROGEN; OXYGEN; PRESSURE EFFECTS; REFRACTIVE INDEX; SPUTTER DEPOSITION; SYNTHESIS (CHEMICAL); THIN FILMS;

BRUGGEMAN MODEL; DRUDE MODEL; LORENTZ LORENZ MODEL; SILICON OXYNITRIDE;

SILICON COMPOUNDS;

EID: 0031547715     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)00959-7     Document Type: Article

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