Effects of bombardment on optical properties during the deposition of silicon nitride by reactive ion-beam sputtering

Applied Optics

Volumn 35, Issue 19, 1996, Pages 3620-3626

  Lambrinos, M F ^a   Valizadeh, R ^a   Colligon, J S ^a  

^a UNIVERSITY OF SALFORD   (United Kingdom)

Author keywords

Hard coating; Ion assist; Optical coating; Optical constants; Sputtering; Thin film

Indexed keywords

EID: 0001435532     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.35.003620     Document Type: Article

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