SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Journal of Crystal Growth

Volumn 173, Issue 1-2, 1997, Pages 1-4

Selective meltback etching of Gan layers in liquid-phase electroepitaxial technique

(5) Novikov, S V a Cheng, T S b Mahmood, Z b Harrison, I b Foxon, C T b

a IOFFE INSTITUTE (Russian Federation)

b UNIVERSITY OF NOTTINGHAM (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; LIQUID PHASE EPITAXY; SEMICONDUCTING GALLIUM ARSENIDE; SOLUTIONS;

GALLIUM NITRIDE; LIQUID PHASE ELECTROEPITAXY (LPEE); SELECTIVE MELTBACK ETCHING;

NITRIDES;

EID: 0031547045 PISSN: 00220248 EISSN: None Source Type: Journal
DOI: 10.1016/S0022-0248(96)00835-4 Document Type: Article

Times cited : (11)

References (19)

1
- 0000815007
- S. Strite and H. Morkoc, J. Vac. Sci. Technol. B 10 (1992) 1237.
- (1992) J. Vac. Sci. Technol. B , vol.10 , pp. 1237
- Strite, S.¹ Morkoc, H.²

2
- 0030103958
- M.S. Minsky, M. White and E.L. Hu, Appl. Phys. Lett. 68 (1996) 1531.
- (1996) Appl. Phys. Lett. , vol.68 , pp. 1531
- Minsky, M.S.¹ White, M.² Hu, E.L.³

3
- 0001544180
- J.R. Mileham, S.J. Pearton, C.R. Abernathy, J.D. Mackenzie, R.J. Shul and S.P. Kilcoyne, Appl. Phys. Lett. 67 (1995) 1119.
- (1995) Appl. Phys. Lett. , vol.67 , pp. 1119
- Mileham, J.R.¹ Pearton, S.J.² Abernathy, C.R.³ Mackenzie, J.D.⁴ Shul, R.J.⁵ Kilcoyne, S.P.⁶

4
- 51249168527
- A.T. Ping, C. Youtsey, I. Adesida, M.A. Khan and J.N. Kuznia, J. Electron. Mater. 24 (1995) 229.
- (1995) J. Electron. Mater. , vol.24 , pp. 229
- Ping, A.T.¹ Youtsey, C.² Adesida, I.³ Khan, M.A.⁴ Kuznia, J.N.⁵

5
- 0000979408
- S.J. Pearton, J.W. Lee, J.D. Mackenzie, C.R. Abernathy and R.J. Shul, Appl. Phys. Lett. 67 (1995) 2329.
- (1995) Appl. Phys. Lett. , vol.67 , pp. 2329
- Pearton, S.J.¹ Lee, J.W.² Mackenzie, J.D.³ Abernathy, C.R.⁴ Shul, R.J.⁵

6
- 0040470158
- Nagoya, Japan
- Y. Kaneko, N. Yamada, T. Takeuchi, H. Amano and I. Akasaki, in: Proc. Topical Workshop on III-V Nitrides, Nagoya, Japan (1995) p. 12.
- (1995) Proc. Topical Workshop on III-V Nitrides , pp. 12
- Kaneko, Y.¹ Yamada, N.² Takeuchi, T.³ Amano, H.⁴ Akasaki, I.⁵

7
- 0006266974
- Ed. J.H. Edgar INSPEC, London
- S. Porowski and I. Grzegory, in: Properties of Group III Nitrides, Ed. J.H. Edgar (INSPEC, London, 1994) p. 76.
- (1994) Properties of Group III Nitrides , pp. 76
- Porowski, S.¹ Grzegory, I.²

8
- 0023004767
- T. Bryskiewicz, Progr. Crystal Growth Characterization 12 (1986) 29.
- (1986) Progr. Crystal Growth Characterization , vol.12 , pp. 29
- Bryskiewicz, T.¹

9
- 0029208053
- L.V. Golubev, A.V. Egorov, S.V. Novikov and Yu.V. Shmartsev, J. Crystal Growth 146 (1995) 277.
- (1995) J. Crystal Growth , vol.146 , pp. 277
- Golubev, L.V.¹ Egorov, A.V.² Novikov, S.V.³ Shmartsev, Yu.V.⁴

10
- 36448999784
- T.S. Cheng, L.C. Jenkins, S.E. Hooper, C.T. Foxon, J.W. Orton and D.E. Lacklison, Appl. Phys. Lett. 66 (1995) 1509.
- (1995) Appl. Phys. Lett. , vol.66 , pp. 1509
- Cheng, T.S.¹ Jenkins, L.C.² Hooper, S.E.³ Foxon, C.T.⁴ Orton, J.W.⁵ Lacklison, D.E.⁶

11
- 0029309212
- C.T. Foxon, T.S. Cheng, S.V. Novikov, D.E. Lacklison, L.C. Jenkins, D. Johnston, J.W. Orton, S.E. Hooper, N. Baba-Ali, T.L. Tansley and V.V. Tret'yakov, J. Crystal Growth 150 (1995) 892.
- (1995) J. Crystal Growth , vol.150 , pp. 892
- Foxon, C.T.¹ Cheng, T.S.² Novikov, S.V.³ Lacklison, D.E.⁴ Jenkins, L.C.⁵ Johnston, D.⁶ Orton, J.W.⁷ Hooper, S.E.⁸ Baba-Ali, N.⁹ Tansley, T.L.¹⁰ Tret'yakov, V.V.¹¹

12
- 0039877171
- Yu.F. Biryulin, V.V. Vorob'eva, L.V. Golubev, S.V. Novikov and Yu.V. Shmartsev, Sov. Phys. Tech. Phys. 29 (1984) 812.
- (1984) Sov. Phys. Tech. Phys. , vol.29 , pp. 812
- Biryulin, Yu.F.¹ Vorob'eva, V.V.² Golubev, L.V.³ Novikov, S.V.⁴ Shmartsev, Yu.V.⁵

13
- 0011922914
- M.B. Panish, R.T. Lynch and S. Sumski, Trans. Met. Soc. AIME 245 (1969) 559.
- (1969) Trans. Met. Soc. AIME , vol.245 , pp. 559
- Panish, M.B.¹ Lynch, R.T.² Sumski, S.³

14
- 84964935301
- R.N. Hall, J. Electrochem. Soc. 110 (1963) 385.
- (1963) J. Electrochem. Soc. , vol.110 , pp. 385
- Hall, R.N.¹

15
- 0017466278
- R.F. Brebrick, Met. Trans. A 8A (1977) 403.
- (1977) Met. Trans. A , vol.8 A , pp. 403
- Brebrick, R.F.¹

16
- 0025229321
- A. Abul-Fadl, W. Collis, S. Maanaki, T. McCarty and S. Iyer, J. Electron. Mater. 19 (1990) 111.
- (1990) J. Electron. Mater. , vol.19 , pp. 111
- Abul-Fadl, A.¹ Collis, W.² Maanaki, S.³ McCarty, T.⁴ Iyer, S.⁵

17
- 0019623558
- S. Isozumi, C.J. Herman, A. Okamoto, J. Lagowski and H.C. Gates, J. Electrochem. Soc. 128 (1981) 2220.
- (1981) J. Electrochem. Soc. , vol.128 , pp. 2220
- Isozumi, S.¹ Herman, C.J.² Okamoto, A.³ Lagowski, J.⁴ Gates, H.C.⁵

18
- 0041064270
- S. Sakai, Y. Ohashi and Y. Shintani, J. Appl. Phys. 70 (1991) 4899.
- (1991) J. Appl. Phys. , vol.70 , pp. 4899
- Sakai, S.¹ Ohashi, Y.² Shintani, Y.³

19
- 0019897569
- X.F. Yang, L. Huang and H.C. Gatos, J. Electrochem. Soc. 129 (1982) 194.
- (1982) J. Electrochem. Soc. , vol.129 , pp. 194
- Yang, X.F.¹ Huang, L.² Gatos, H.C.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.