Investigation of damage formation by gas cluster ion bombardment

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 112, Issue 1-4, 1996, Pages 89-93

  Matsuo, Jiro ^a   Takeuchi, Daisuke ^a   Kitai, Atsushi ^a   Yamada, Isao ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ION BEAM LITHOGRAPHY; ION SOURCES; IONS; PARTICLE ACCELERATORS; SURFACES;

ENERGETIC CLUSTER IONS; GAS CLUSTER ION ACCELERATOR; GAS CLUSTER ION BOMBARDMENT;

ION BOMBARDMENT;

EID: 0030563240     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(95)01231-1     Document Type: Article

References (26)

1. I. Yamada, G.H. Takaoka, M.I. Current, Y. Yamashita and M. Ishii, Nucl. Instr. and Meth. B 74 (1993) 341.
2. J. Gspann, Laser and Ion Beam Modification of Materials, ed. I. Yamada (Elsevier, Amsterdam, 1994) p. 107.
3. R. Beuhler and L. Friedman, Chem. Rev. 86 (1986) 521.
4. C. Yeretzian, K. Hansen, R.D. Deck and R. Whetten, J. Chem. Phys. 98 (1993) 7480.
5. A. Perez, M. Döbeli and H.A. Synal, Nucl. Instr. and Meth. B 88 (1994) 25.
6. K. Boussofiane-Baudin, G. Bolbach, A. Brunelle, S. Della-Negra, P. Hakansson and Y. Le Beyec, Nucl. Instr. and Meth. B 88 (1994) 160.
7. P.R.W. Henkes, Rev. Sci. Instrum. 66 (1990) 360.
8. P.R.W. Henkes and R. Klingelhöfer, Vacuum 39 (1989) 541.
9. H. Haberland, Z. Insepov and M. Moseler, Phys. Rev. B 51 (1995) 11061.
10. J.A. Northby, T. Jiang, G.H. Takaoka, I. Yamada, W.L. Brown and M. Sosnowski, Nucl. Instr. and Meth. B 74 (1993) 336.
11. J. Matsuo, M. Akizuki, J.A. Northby, G.H. Takaoka and I. Yamada, Proc. of ICSSPIC-7, in: Surf. Rev. Lett, in press.
12. M. Akizuki, M. Harada, Y. Miyai, A. Doi, T. Yamaguchi, J. Matsuo, G.H. Takaoka, C.E. Ascheron and I. Yamada, Proc. of ICSSPIC-7, in: Surf. Rev. Lett. in press.
13. H. Hsieh, R.S. Averback, H. Sellers and C.P. Flynn, Phys. Rev. B 45 (1992) 4417.
14. Z. Insepov, M. Sosnowski and I. Yamada, Laser and Ion Beam Modification of Materials, ed. I. Yamada (Elsevier, Amsterdam, 1994) p. 111.
15. M. Akizuki, M. Harada, Y. Miyai, A. Doi, T. Yamaguchi, J. Matsuo, G.H. Takaoka, C.E. Ascheron and I. Yamada, Nucl. Instr. and Meth. B 99 (1995) 229.
16. I. Yamada, J. Matsuo, Z. Insepov and M. Akizuki, Proc. of IBMM 1994.
17. J. Matsuo, H. Abe, G.H. Takaoka and I. Yamada, Nucl. Instr. and Meth. B 99 (1995) 244.
18. O. Echt, O. Kandler, T. Leisner, W. Miehle and E. Recknagel, J. Chem. Soc. Faraday Trans. 86 (1990) 2411.
19. W. Miehle, O. Kandler, T. Leisner, O. Echt, J. Chem. Phys. 91 (1989) 5940.
20. O.C. Yonts, C.E. Normand and D.E. Harrison, Jr, J. Appl. Phys. 31 (1960) 447.
21. I.A. Harris, R.S. Kidmwell and J.A. Northby, Phys. Rev. Lett. 56 (1984) 2390.
22. T. Jiang and J.A. Northby, Proc. 1st Meeting on IESJ'92 Tokyo (1992) 235.
23. L.C. Feldman, R.L. Kauffman and P.J. Silverman, Phys. Rev. Lett. 39 (1977) 38.
24. H. Amir, Al-Bayati, G.K. Orrman-Rossiter, J.A. van den Berg and D.G. Armour, Surf. Sci. 241 (1991) 91.
25. J.P. Biersack and L.G. Haggmark, Nucl. Instr. and Meth. 174 (1980) 257.
26. Z. Insepov and I. Yamada, Nucl. Instr. and Meth., in press XXXX update? XXXX.