Effect of oxygen adsorption on ion beam induced recrystallization of copper films

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 121, Issue 1-4, 1997, Pages 157-161

  Hishita, S ^a   Oyoshi, K ^a   Suehara, S ^a   Aizawa, T ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; ARGON; EPITAXIAL GROWTH; FILMS; ION BEAMS; ION BOMBARDMENT; IONS; OXYGEN; RADIATION EFFECTS; RECRYSTALLIZATION (METALLURGY); SUBSTRATES;

ION BEAM EFFECTS;

COPPER;

EID: 0031546243     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)80011-0     Document Type: Article

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