Effects of ion beam irradiation on the crystallization of copper films

Materials Research Society Symposium - Proceedings

Volumn 396, Issue , 1996, Pages 195-199

  Hishita, Shunichi ^a   Oyoshi, Keiji ^a   Suehara, Shigeru ^a   Aizawa, Takashi ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; COPPER; CRYSTAL ORIENTATION; CRYSTALLIZATION; DEPOSITION; EPITAXIAL GROWTH; EVAPORATION; ION BOMBARDMENT; OXYGEN; RADIATION EFFECTS; STRONTIUM COMPOUNDS; THERMAL EFFECTS;

COPPER FILMS; OXIDE CRYSTAL; OXYGEN ADSORPTION; STRONTIUM TITANATE; WORKING PRESSURE;

METALLIC FILMS;

EID: 0029709218     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)