◆ A computing environment for spatial data analysis in the microelectronics industry

Bell Labs Technical Journal

Volumn 2, Issue 1, 1997, Pages 114-129

  Hansen, Mark H ^a   James, David A ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DATA ACQUISITION; MICROELECTRONICS; SEMICONDUCTOR DEVICE MANUFACTURE;

SOFTWARE PACKAGE S WAFERS;

COMPUTER SOFTWARE;

EID: 0031542329     PISSN: 10897089     EISSN: None     Source Type: Journal    
DOI: 10.1002/bltj.2036     Document Type: Article

References (13)

1. R. A. Becker, J. M. Chambers, and A. R. Wilks, The New S Language, Wadsworth, Pacific Grove, California, 1988.
2. J. M. Chambers and T. Hastie, eds., Statistical Models in S, Wadsworth, Pacific Grove, California, 1992.
3. Visual Basic Language Version 3.0, Microsoft Corp., Redmond, Washington, 1994.
4. L. Denby and D. A. James, "A Graphical User Interface for Spatial Data Analysis in Integrated Circuit Manufacturing," Computing Science and Statistics, Vol. 27, edited by M. Meyer and J. Rosenberg, Interface Foundation of North America, Fairfax Station, Virginia, 1995, pp. 212-219.
5. M. H. Hansen, V. N. Nair, and D. Friedman, "Monitoring Wafer Map Data from Integrated Circuit Fabrication Processes for Spatially Clustered Defects," Technometrics, 1997 (forthcoming).
6. L. H. Nakatani and L. W. Ruedisueli, The FIT Programming Language Reference Manual, AT&T Bell Laboratories, Murray Hill, New Jersey, 1991.
7. D. Friedman, M. H. Hansen, V. Nair, and D. A. James, "Model-Free Estimation of Some Yield Metrics in Semiconductor Manufacturing," Submitted to IEEE Transactions on Semiconductor Manufacturing, 1997 (forthcoming).
8. M. H. Hansen and V. N. Nair, "Process and Productivity Improvement in Semiconductor Manufacturing," Computing Science and Statistics, Vol. 27, edited by M. Meyer, Interface Foundation of North America, Fairfax Station, Virginia, June 1995, pp. 3-7.
9. S-PLUS Software Documentation Version 3.3, StatSci Division of MathSoft Inc., Seattle, Washington, 1995.
10. J. M. Chambers, "Evolution of the S Language," Computing Science and Statistics, Vol. 28, Interface Foundation of North America, Fairfax Station, Virginia, 1996.
11. B. S. Everitt, A Handbook of Statistical Analyses Using S-PLUS, Chapman and Hall, London, 1994.
12. P. Spector, An Introduction to S and S-Plus, Duxbury, Belmont, California, 1994.
13. W. N. Venables and B. D. Ripley, Modern Applied Statistics with S-Plus, Springer-Verlag, New York, 1994.