SCOPUS 정보 검색 플랫폼

Volumn 30, Issue SUPPL. PART 1, 1997, Pages

Room temperature nucleation of nickel suicide on single crystal silicon

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031517106 PISSN: 03744884 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (1)

References (7)

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2
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- J. B. Laskey, J. S. Nakos, O. J. Chan and P. J. Geiss, IEEE Trans. Electron Dev. 38, 262 (1991).
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- D. X. Xu, S. R. Das, J. P. McCaffrey, C. Y. Peters and L. E. Erickson, Mat. Res. Soc. Symp. Proc. 402, 59 (1996).
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- Xu, D.X.¹ Das, S.R.² McCaffrey, J.P.³ Peters, C.Y.⁴ Erickson, L.E.⁵

4
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- T. Morimoto, T. Chfuro, H. S. Momose, T. Iinuma, I. Kunishima, K. Suguro, I. Katakabe, H. Nakajima, M. Tsuchiaki, M. Ono, Y. Katsumata and H. Iwai, IEEE Trans. Electron Dev. 42, 915 (1995).
- (1995) IEEE Trans. Electron Dev. , vol.42 , pp. 915
- Morimoto, T.¹ Chfuro, T.² Momose, H.S.³ Iinuma, T.⁴ Kunishima, I.⁵ Suguro, K.⁶ Katakabe, I.⁷ Nakajima, H.⁸ Tsuchiaki, M.⁹ Ono, M.¹⁰ Katsumata, Y.¹¹ Iwai, H.¹²

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- R. W. Bene, J. Appl. Phys. 61, 1826 (1987).
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6
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- Academic Press, New York
- S. P. Muraka, in Sulicides for VLSI Applications (Academic Press, New York, 1983).
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- Muraka, S.P.¹

7
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- A. Hiraki, Surface Science 168, 74 (1986).
- (1986) Surface Science , vol.168 , pp. 74
- Hiraki, A.¹

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