On the effect of bakeout for the pumping speed dependence of outgassing rate in a stainless steel chamber

Vacuum

Volumn 47, Issue 6-8, 1996, Pages 741-744

  Akaishi, K ^a   Kubota, Y ^a   Motojima, O ^a   Mushiaki, M ^b   Funato, Y ^c  

^a NATIONAL INSTITUTE FOR FUSION SCIENCE   (Japan)

^b KAWASAKI MEDICAL SCHOOL   (Japan)

^c SUZUKA NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

Author keywords

Baking effect; Outgassing rate; Outgassing scaling law; Pumping speed dependence; Sticking probability

Indexed keywords

ADSORPTION; DESORPTION; MATHEMATICAL MODELS; SPEED; STAINLESS STEEL; SURFACES; VACUUM;

BAKEOUT; OUTGASSING SCALING LAW; PUMPING SPEED; STICKING PROBABILITY; VACUUM CHAMBERS;

DEGASSING;

EID: 0030169007     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0042-207x(96)00059-0     Document Type: Article

References (5)

1. K Akaishi, K Ezaki, Y Kubota, O Motojima and M Mushiaki, J Vac Soc Japan (in Japanese), 38, 266 (1995).
2. K Akaishi, Y Kubota, O Motojima, Y Funato and M Mushiaki, J Vac Sci Technol, (in press).
3. K Mukugi, Abstract of the fall meeting of Japan Vac Soc, 31 October-1 November 1991, Tokyo (In Japanese) p 81.
4. Y Tuzi, Y Kurokawa and K Takeuchi, J Vac Soc Japan (in Japanese), 35, 845 (1992).
5. Y Tuzi, Y Kurokawa and K Takeuchi, Vacuum, 44, 447 (1993).