Resolution enhancement techniques for optical lithography and optical imaging theory

Optical Review

Volumn 4, Issue 1 PART B, 1997, Pages 151-160

  Shibuya, Masato ^a  

^a NIKON CORPORATION   (Japan)

Author keywords

Imaging; Imaging theory; Lithography; Optics; Resolution enhancement; Super resolution

Indexed keywords

EID: 0031486812     PISSN: 13406000     EISSN: None     Source Type: Journal    
DOI: 10.1007/bf02931670     Document Type: Article

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