Static secondary ion mass spectrometry study of the decomposition of triethylgallium on GaAs (100)

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 6, 1997, Pages 3127-3133

  Wong, K C ^a   Jackson, M S ^a,b   McEllistrem, M T ^a,c   Culp, R D ^a,d   Ekerdt, J G ^a  

^a The University of Texas at Austin   (United States)

^b APPLIED MATERIALS INC   (United States)

^c University of North Carolina at Chapel Hill   (United States)

^d EASTMAN CHEMICAL COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031484844     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580856     Document Type: Article

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