Particle contamination formation in magnetron sputtering processes

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 4, 1997, Pages 2023-2028

  Selwyn, Gary S ^a   Weiss, Corey A ^b   Sequeda, Federico ^c,d   Huang, Carrie ^c,e  

^a LOS ALAMOS NATIONAL LABORATORY   (United States)

^b Materials Research Corporation   (United States)

^c SEAGATE TECHNOLOGY   (United States)

^d UNIVERSIDAD DEL VALLE   (Colombia)

^e IBM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031482563     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580674     Document Type: Article

References (19)

1. J. A. Floro, S. M. Rossnagel, and R. S. Robinson, J. Vac. Sci. Technol. A 1, 1398 (1983).
2. J. A. Floro, S. M. Rossnagel, and R. S. Robinson, Radiat. Effects Lett. 68, 57 (1982).
3. G. K. Wehner, J. Vac. Sci. Technol. A 3, 1821 (1985).
4. G. S. Selwyn, J. Singh, and R. S. Bennett, J. Vac. Sci. Technol. A 7, 2758 (1989).
5. K. G. Spears, T. J. Robinson, and R. M. Roth, IEEE Trans. Plasma Sci. 14, 179 (1986).
6. J. Goree, Plasma Sources Sci. Technol. 3, 400 (1994).
7. M. J. McCaughey and J. J. Kushner, J. Appl. Phys. 69, 6952 (1991).
8. G. S. Selwyn, K. L. Haller, and J. E. Heidenreich, Appl. Phys. Lett. 57, 1876 (1990).
9. M. S. Barnes, J. H. Keller, J. C. Forster, and J. A. O'Neill, Phys. Rev. Lett. 68, 313 (1992).
10. J. E. Daugherty and D. B. Graves, J. Vac. Sci. Technol. A 11, 1126 (1993).
11. For an overview of work in this area, see the Proceedings of NATO Advanced Workshop on Formation, Transport and Consequences of Particles in Plasmas, Plasma Sources 3 (dedicated issue) 1994.
12. G. S Selwyn, Particles and Gases and Liquids 3: Detection, Characterization and Control, edited by K. L. Mittal (Plenum, New York, 1993), pp. 213-222, and references therein.
13. G. S. Selwyn, K. L. Haller, and E. F. Patterson, J. Vac. Sci. Technol. A 11, 1132 (1993).
14. G. S. Selwyn and A. D. Bailey III, J. Vac. Sci. Technol. A 14, 649 (1996).
15. G. S. Selwyn. Jpn. J. Appl. Phys. 32, 3068 (1993).
16. R. N. Carlile, S. G. Geha, J. F. O'Hanlon, and J. C. Stewart, Appl. Phys. Lett. 67, 1167 (1991).
17. S. G. Geha, R. N. Carlile, J. F. O'Hanlon, and G. S. Selwyn, J. Appl. Phys. 72, 374 (1992).
18. W. W. Stoffels, E. Stoffels, G. M. W. Kroesen, and F. J. de Hoog, J. Vac. Sci. Technol. A 14, 588 (1996).
19. M. Dalvie, M. Surendra, G. S. Selwyn, and C. R. Guarnieri, Plasma Sources Sci. Technol. 3, 442 (1994).