Importance of relativistic effect on inelastic scattering cross-sections for quantitative microanalysis

Micron

Volumn 28, Issue 5, 1997, Pages 381-388

  Kurata, Hiroki ^a   Wahlbring, Petra ^b,c   Isoda, Seiji ^b   Kobayashi, Takashi ^a  

^a JAPAN ATOMIC ENERGY AGENCY   (Japan)

^b KYOTO UNIVERSITY   (Japan)

^c UNIVERSITY OF LUXEMBOURG   (Luxembourg)

Author keywords

EELS; EFTEM; Elemental mapping; Relativistic cross sections

Indexed keywords

EID: 0031414880     PISSN: 09684328     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0968-4328(97)00044-9     Document Type: Article

References (17)

1. Chen, C. H., Silcox, J. and Vincent, R., 1975. Electron-energy losses in silicon: Bulk and surface plasmons and Cerenkov radiation. Phys. Rev., B12, 64-71.
2. Egerton, R. F., 1979. K-shell ionization cross-sections for use in microanalysis. Ultramicroscopy, 4, 169-179.
3. Egerton, R. F., 1989. Quantitative analysis of electron-energy-loss spectra. Ultramicroscopy, 28, 215-225.
4. Egerton, R. F., 1996. Electron Energy-loss Spectroscopy in the Electron Microscope, Plenum Press, New York.
5. Fano, U., 1956. Differential inelastic scattering of relativistic charged particles. Phys. Rev., 102, 385-387.
6. Festenberg, C. and Kröger, E., 1968. Retardation effects for the electron energy loss probability in GaP and Si. Phys. Lett., 26, 339-340.
7. Gubbens, A. J., Kraus, B., Krivanek, O. L. and Mooney, P. E., 1995. An imaging filter for high voltage electron microscopy. Ultra-microscopy, 59, 255-265.
8. Inokuti, M., 1971. Inelastic collisions of fast charged particles with atoms and molecules; The Bethe theory revisited. Rev. Mod. Phys., 43, 297-347.
9. Knippelmeyer, R., Wahlbring, P. and Kohl, H., 1997. Relativistic ionization cross sections for use in microanalysis. Ultramicroscopy, 68, 25-41.
10. Krivanek, O. L., Kundmann, M. K. and Kimoto, K., 1995. Spatial resolution in EFTEM elemental maps. J. Microscopy, 180, 277-287.
11. Kröger, E., 1968. Berechnung der Energieverluste schneller Elektronen in dünnen Schichten mit Retardierung. Z. Physik, 216, 115-135.
12. Kröger, E., 1970. Transition radiation, Cerenkov radiation and energy losses of relativistic charged particles traversing thin foils at oblique incidence. Z. Physik, 235, 403-421.
13. Kurata, H., Isoda, S. and Kobayashi, T., 1995. Quantitative elemental distribution image of a carbon nanotube. Microsc. Microanal. Microstruct., 6, 405-413.
14. Kurata, H., Moriguchi, S., Isoda, S. and Kobayashi, T., 1996. Attainable resolution of energy-selecting image using high-voltage electron microscope. J. Electron Microsc., 45, 79-84.
15. Leapman, R. D., Rez, P. and Mayers, D. F., 1980. K, L, and M shell generalized oscillator strengths and ionization cross sections for fast electron collisions. J. Chem. Phys., 72, 1232-1243.
16. Reimer, L., (ed.), 1995. Energy-filtering Transmission Electron Microscopy. Springer Series in Optical Science, Springer, Berlin.
17. Ritchie, R. H., 1957. Plasma losses by fast electrons in thin films. Phys. Rev., 106, 874-881.