Excimer formation using low energy electron beam excitation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3403, Issue , 1997, Pages 300-307

  Ulrich, Andreas ^a   Wieser, Jochen ^a   Murnick, Daniel E ^a  

^a TECHNICAL UNIVERSITY OF MUNICH   (Germany)

Author keywords

Ceramic foils; Electron beam excitation; Rare gas excimers; Silicon nitride; VUV light source

Indexed keywords

ELECTRIC POTENTIAL; ELECTRON BEAMS; INERT GASES; SILICON NITRIDE; ULTRAVIOLET RADIATION;

LOW ENERGY ELECTRON BEAMS;

EXCIMER LASERS;

EID: 0031390391     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.311957     Document Type: Conference Paper

References (28)

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