Silane safety study: Compressed gas association performs large scale tests

SSA Journal: Journal of the Semiconductor Safety Association

Volumn 11, Issue 4, 1997, Pages 47-57

  Chowdhury, Naser ^a,b,c  

^a AIR PRODUCTS AND CHEMICALS INC   (United States)

^b Air Products and Chemicals Inc ^*  (United States)

^c UNIVERSITY OF NORTH DAKOTA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCIDENT PREVENTION; CODES (STANDARDS); FIRE PROTECTION; FLAMMABILITY TESTING; SEMICONDUCTOR DEVICE MANUFACTURE;

SILANE RELEASES; SILANE TESTING;

SILANES;

EID: 0031389402     PISSN: 1084578X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (20)

1. Hazards Research Corporation Program 5268, Rockaway, New Jersey, March 1983, pp. 2.
2. Cruice, W. J., "Sensitivity of Silane to Thermal and Shock Stress," Hazard Research Corp., Report HRC 3750 for Compressed Gas Association, July 19, 1977.
3. Britton L.G., "Improve Your Handling of Silane," Semiconductor International, April 1991, pp. 89 & 90.
4. "Guidelines for Evaluating the Effects of Vapor Cloud Explosions Using a TNT Equivalency Method," Factory Mutual Engineering Associates Loss Prevention Data 7-OS, 1994, pp. 2-5 & 27.
5. Hazards Research Corporation Letter Report 5268-1, Rockaway, New Jersey, April 1983, pp. 2.
6. Guralnik, D. B., Ed., "New World Dictionary," Cleveland, New York, 1974.
7. Stookey, S. A., "The History and Future of Silane as a Regulated Hazardous Material," Austin, Texas, pp. 1,2,16,20 & 21.
8. "Hazards Evaluation of a Specific Silane Storage, Handling and Use System," Hazards Research Corporation Report 5455, Rockaway, New Jersey, July 1983, Appendix A,A2 pp. 8,10-12,15-17.
9. Britton, L. G., "Combustion Hazards of Silane and Its Chlorides," South Charleston, West Virginia, January 1990, pp. 17,25,26,28.
10. Ring M.A., O'Neal H.E. and Famil-Ghiriha J., "Silane-O2 Explosions, Their Characteristics and Their Control," American Institute of Physics, 1988, pp. 175.
11. "Effects of Releases of Silane Mixtures in Ambient Air," Hazards Research Corporation Program Report 4007, Rockaway, New Jersey, December 1978, pp.5,10,26.
12. Shiban S., "Pyrophoric Effluent Treatment For the prevention of Fires and Explosions," Intel, Oregon, January 1993, pp. 3.
13. Urano, Youkichi, et. al., Chemical Technology Research, vol 84, No. 10, 1989, pp. 585-93.
14. Fthenakis V.M. and Moskowitz P.D., "An Assessment of Silane Hazards," Solid State Technology, January 1990, pp. 82.
15. Shiban S. "Silane Storage and Use," Presentation to SSA, April 1992, pp. 25.
16. "Leakage of Silane in Cabinets and Ducts," Hazards Research Corporation Report 5038, Rockaway, New Jersey, May 1982, pp. 15.
17. Chowdhury, N.M., Mostowy, L.J., "Developing A Bulk Distribution System for High-Purity Hydrogen Chloride," Micro, September 1995, pp. 33-37
18. Chowdhury, N.M., "Bulk Silane Release and Vapor Cloud Explosion," Semiconductor International, June 1996, pp. 155-160.
19. CGA Draft Report, "Bulk Silane Safety Review," Silane Task Force Docket No. 94, February 1997.
20. Tamanini, E, Chaffee, J.L., "Ignition Characteristics of Release of 100% Silane," SEMATECH technology transfer 96013067A-ENG, March 7, 1996, pp. 5,6.