Bulk silane release and vapor cloud explosion

Semiconductor International

Volumn 19, Issue 6, 1996, Pages 155-160

  Chowdhury, Naser M ^a  

^a AIR PRODUCTS AND CHEMICALS INC   (United States)

Author keywords

Gas distribution systems; Hazardous materials; Materials handling; Silane

Indexed keywords

EID: 30844445579     PISSN: 01633767     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (16)

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13. S. Shiban, "Silane Storage and Use," Presentation to SSA, April 1992, pp. 25.
14. "Leakage of Silane in Cabinets and Ducts," Hazards Research Corporation Report 5038, Rockaway, N.J., May 1982, p. 15.
15. Hazards Research Corporation Program 5268, Rockaway, N.J. March 1983, p. 2.
16. Youkichi Urano et al., Chemical Technology Research, vol. 84, No. 10, 1989, pp. 585-93.