Formation of hydrogen molecules in crystalline silicon treated with atomic hydrogen

Materials Research Society Symposium - Proceedings

Volumn 442, Issue , 1997, Pages 269-274

  Murakami, K ^a   Fukata, N ^a   Sasaki, S ^a   Ishioka, K ^a   Nakamura, K G ^a   Kitajima, M ^a   Fujimura, S ^a   Kikuchi, J ^a   Haneda, H ^a  

^a UNIVERSITY OF TSUKUBA   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; CRYSTAL DEFECTS; CRYSTAL IMPURITIES; CRYSTALLINE MATERIALS; DEUTERIUM; HYDROGEN; MOLECULES; RAMAN SPECTROSCOPY;

CRYSTALLINE SILICON; HYDROGEN ATOM TREATMENT; MICROVOID;

SEMICONDUCTING SILICON;

EID: 0030673061     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)