Texture evolution in stratified AI thin films

Solid State Phenomena

Volumn 56, Issue , 1997, Pages 213-218

  Adamik, M ^a   Tomov, I ^b   Barna, P B ^a  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^b INSTITUTE OF PHYSICAL CHEMISTRY   (Bulgaria)

Author keywords

Morphology; Texture; Thin film

Indexed keywords

ALUMINUM; AMORPHOUS FILMS; FILM GROWTH; GRAIN GROWTH; MORPHOLOGY; NUCLEATION; SILICA; TEXTURES; THIN FILMS; TITANIUM;

THIN FILM STRATIFICATION;

METALLIC FILMS;

EID: 0031384281     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: None     Document Type: Article

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