Computer simulation of impurity diffusion in the vicinity of grain boundaries (modified fisher model)

Solid State Phenomena

Volumn 57-58, Issue , 1997, Pages 471-476

  Fedotov, A ^a   Chuiko, M ^b   Rabyshko, A ^a   Shumski, S ^a  

^a BELARUSIAN STATE UNIVERSITY   (Belarus)

^b INSTITUTE OF MATHEMATICS   (Belarus)

Author keywords

Fisher Model; Grain Boundary Diffusion; Impurity Diffusion; Polycrystals

Indexed keywords

DIFFUSION IN SOLIDS; POLYCRYSTALS; SEMICONDUCTOR DEVICE MANUFACTURE; COMPUTER SIMULATION; CRYSTAL IMPURITIES; MASS TRANSFER; MATHEMATICAL MODELS; RESIDUAL STRESSES;

ELASTIC FORCE; FISHER MODEL; GRAIN-BOUNDARY DIFFUSION; IMPURITY ATOMS; IMPURITY DIFFUSION; IMPURITY PROFILE; INTERNAL MECHANICAL STRESS;

GRAIN BOUNDARIES;

MODIFIED FISHER MODEL;

EID: 0031381768     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/ssp.57-58.471     Document Type: Article

References (5)

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3. Atomic Diffusion in Semiconductors. Ed By D. Shaw, Plenum press, London (1973), Chapter 5.
4. Handbook of Physical and Chemical Properties of Elements. Ed. by G. V. Satnsonov, Naukova Dumka, Kiev (1965), (in Russian)
5. A. Fedotov, A. Drozdovski and S. Shumski. In: Polycrystalline Semiconductors IV-Physics, Chemistry and Technology Ed. by S. Pizzini, H. P. Strunk and J. H. Werner, Solid State Phenomena, Vols. 51-52 (1996), p 33.