Dielectric microfilter arrays for multispectral measuring devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3008, Issue , 1997, Pages 265-272

  Frank, Marcus ^a   Schallenberg, Uwe B ^a   Kaiser, Norbert ^a   Buß, Wolfgang ^a  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

Colour measuring devices; Dielectric filter arrays; Etchstop layer; Micropattern; Reactive Ion Etching

Indexed keywords

DIELECTRIC MATERIALS; LIGHT INTERFERENCE; OPTICAL DESIGN; OPTICAL FILTERS; REACTIVE ION ETCHING; SPECTRUM ANALYSIS;

DIELECTRIC FILTERS; MULTISPECTRAL MEASURING DEVICES;

OPTICAL DEVICES;

EID: 0031371832     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.271423     Document Type: Conference Paper

References (7)

1. Excimer laser ablation patterning of dielectric layers
2. Patterning of multilayer dielectric optical coatings for multispectral CCDs
3. Fabrication of mosaic color filters by dry-etching dielectric stacks
4. Microstructured multilayer dielectric coatings