Microstructured multilayer dielectric coatings with binary optical functions

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2776, Issue , 1996, Pages 330-335

  Frank, Marcus ^a   Schallenberg, Uwe B ^a   Kaiser, Norbert ^a  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC MATERIALS; ETCHING; LIGHT INTERFERENCE; MICROSTRUCTURE; MULTILAYERS; OPTICAL FILTERS;

DIELECTRIC MULTILAYER STACKS; DRY ETCHING; MICROPATTERNED INTERFERENCE FILTERS; MICROSTRUCTURED MULTILAYER DIELECTRIC COATINGS;

OPTICAL COATINGS;

EID: 0029726048     PISSN: None     EISSN: None     Source Type: None    
DOI: 10.1117/12.246819     Document Type: Conference Paper

References (4)