XPS and IR analysis of thin barrier films polymerized from C2H4/CHF3 ECR-plasmas

Journal of Applied Polymer Science

Volumn 64, Issue 4, 1997, Pages 717-722

  Walker, M ^a   Baumgartner K M ^a   Ruckh, M ^a   Kaiser, M ^a   Schock, H W ^a   Rauchle E ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

Infrared spectroscopy; Plasma polymerized films; Polyethylene; Toluene permeability; X ray photoelectron spectroscopy

Indexed keywords

ETHYLENE; FLUORINE CONTAINING POLYMERS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MECHANICAL PERMEABILITY; MONOMERS; PARAFFINS; PLASMAS; POLYETHYLENES; POLYMERIZATION; THIN FILMS; TOLUENE; X RAY PHOTOELECTRON SPECTROSCOPY;

PLASMA POLYMERIZED FILMS; TRIFLUOROMETHANE;

PLASTIC FILMS;

EID: 0031118838     PISSN: 00218995     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1097-4628(19970425)64:4<717::AID-APP11>3.0.CO;2-R     Document Type: Article

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