Thin film deposition of barium strontium titanate by metal organic decomposition technique

Integrated Ferroelectrics

Volumn 17, Issue 1-4, 1997, Pages 153-163

  Jana, P ^a   Pandey, R K ^a  

^a TEXAS A AND M UNIVERSITY   (United States)

Author keywords

Barium strontium titanate; BST; DRAM fabrication; Metal organic decomposition; MOD; Spin on; Thin film

Indexed keywords

ANNEALING; BARIUM COMPOUNDS; DECOMPOSITION; DEPOSITION; FERROELECTRIC MATERIALS; FILM PREPARATION; PERMITTIVITY MEASUREMENT; PYROLYSIS; SILICON; SUBSTRATES; THIN FILMS;

BARIUM STRONTIUM TITANATE; METAL ORGANIC DECOMPOSITION;

DIELECTRIC FILMS;

EID: 0031355998     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584589708012990     Document Type: Article

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