SCOPUS 정보 검색 플랫폼

Materials Letters

Volumn 33, Issue 3-4, 1997, Pages 133-136

Reactive partially ionized beam deposition of AlN thin films

(3) Feng, Jiayou a Xie, Junqing a Mo, Qingwei a

a TSINGHUA UNIVERSITY (China)

Author keywords

AIN films; Deposition; Reactive partially ionized beam method

Indexed keywords

CRYSTAL STRUCTURE; DEPOSITION; POLYCRYSTALLINE MATERIALS; QUARTZ; SEMICONDUCTING ALUMINUM COMPOUNDS; SILICON WAFERS; STOICHIOMETRY; SYNTHESIS (CHEMICAL); THIN FILMS;

ALUMINUM NITRIDE; REACTIVE PARTIALLY IONIZED BEAM DEPOSITION;

SEMICONDUCTING FILMS;

EID: 0031354558 PISSN: 0167577X EISSN: None Source Type: Journal
DOI: 10.1016/S0167-577X(97)00088-8 Document Type: Article

Times cited : (4)

References (15)

1
- 0027646593
- S. Strite, M.E. Lin, H. Morkoc. Thin Solid Films 231 (1993) 197.
- (1993) Thin Solid Films , vol.231 , pp. 197
- Strite, S.¹ Lin, M.E.² Morkoc, H.³

2
- 0344635359
- K. Dovidenko, S. Oktyabrsky, J. Narayan, M. Razeghi, J. Appl. Phys. 79 (1996) 2439.
- (1996) J. Appl. Phys. , vol.79 , pp. 2439
- Dovidenko, K.¹ Oktyabrsky, S.² Narayan, J.³ Razeghi, M.⁴

3
- 0029288587
- M. Penza, M.F. De Riccardis, L. Minenghi, M.A. Tagliete, E. Verona, Thin Solid Films 259 (1995) 154.
- (1995) Thin Solid Films , vol.259 , pp. 154
- Penza, M.¹ De Riccardis, M.F.² Minenghi, L.³ Tagliete, M.A.⁴ Verona, E.⁵

4
- 0039159231
- W.J. Meng, G.L. Doll, J. Appl. Phys. 79 (1996) 1789.
- (1996) J. Appl. Phys. , vol.79 , pp. 1789
- Meng, W.J.¹ Doll, G.L.²

5
- 0029307142
- R.D. Vispute, J. Narayan, H. Wu, K. Jagannadham, J. Appl. Phys. 77 (1995) 4724.
- (1995) J. Appl. Phys. , vol.77 , pp. 4724
- Vispute, R.D.¹ Narayan, J.² Wu, H.³ Jagannadham, K.⁴

6
- 0001547792
- I.H. Kim, S.H. Kim, J. Vac. Sci. Technol. A 13 (1995) 2814.
- (1995) J. Vac. Sci. Technol. A , vol.13 , pp. 2814
- Kim, I.H.¹ Kim, S.H.²

7
- 0039159230
- S.-N. Mei, T.-M. Lu, J. Vac. Sci. Technol. A 6 (1988) 9.
- (1988) J. Vac. Sci. Technol. A , vol.6 , pp. 9
- Mei, S.-N.¹ Lu, T.-M.²

8
- 0026168884
- H.P. Tang, J.Y. Feng, Y.D. Fang, H.D. Li, J. Cryst. Growth 112 (1991) 407.
- (1991) J. Cryst. Growth , vol.112 , pp. 407
- Tang, H.P.¹ Feng, J.Y.² Fang, Y.D.³ Li, H.D.⁴

9
- 0029354516
- S. Kumar, T.L. Tansley, Jpn. J. Appl. Phys. 34 (1995) 4154.
- (1995) Jpn. J. Appl. Phys. , vol.34 , pp. 4154
- Kumar, S.¹ Tansley, T.L.²

10
- 0029368145
- J.C. Loretz, B. Despax, P. Marti, A. Mazel, Thin Solid Films 265 (1995) 15.
- (1995) Thin Solid Films , vol.265 , pp. 15
- Loretz, J.C.¹ Despax, B.² Marti, P.³ Mazel, A.⁴

11
- 0020195074
- A. Takase, S. Umebayashi, K. Kishi, Jpn. J. Appl. Phys. 21 (1982) 1447.
- (1982) Jpn. J. Appl. Phys. , vol.21 , pp. 1447
- Takase, A.¹ Umebayashi, S.² Kishi, K.³

12
- 0029247216
- N.Q. Danh, K.H. Monz, H.K. Pulker, Thin Solid Films 257 (1995) 116.
- (1995) Thin Solid Films , vol.257 , pp. 116
- Danh, N.Q.¹ Monz, K.H.² Pulker, H.K.³

13
- 0001634201
- X. Li, T.L. Tansly, J. Appl. Phys. 68 (1990) 5369.
- (1990) J. Appl. Phys. , vol.68 , pp. 5369
- Li, X.¹ Tansly, T.L.²

14
- 0040299119
- B. Rauschenbach, K. Breuer, G. Leonhardt, Nucl. Instrum. Methods B47 (1990) 396.
- (1990) Nucl. Instrum. Methods , vol.B47 , pp. 396
- Rauschenbach, B.¹ Breuer, K.² Leonhardt, G.³

15
- 0029388124
- H. Liu, D.C. Bertolet, J.W. Rogers, Surf. Sci. 340 (1995) 88.
- (1995) Surf. Sci. , vol.340 , pp. 88
- Liu, H.¹ Bertolet, D.C.² Rogers, J.W.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.