Microcrystalline silicon films and tandem solar cells prepared by triode PECVD

Solar Energy Materials and Solar Cells

Volumn 49, Issue 1-4, 1997, Pages 171-177

  Liao, Xianbo ^a   Sheng, Shuran ^a   Yun, Feng ^a   Ma, Zhixun ^a   Kong, Guanglin ^a   Zhao, Yuwen ^b   He, Shaoqi ^b   Li, Zhongming ^b  

^a INSTITUTE OF SEMICONDUCTORS   (China)

^b Beijing Solar Energy Research Institute   (China)

Author keywords

Microcrystalline silicon films; PECVD; Tandem solar cells

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DOPING (ADDITIVES); ELECTROOPTICAL EFFECTS; ENERGY CONVERSION; ENERGY EFFICIENCY; FILM PREPARATION; HYDROGENATION; OPTOELECTRONIC DEVICES; PHOTOCONDUCTIVITY; PLASMA APPLICATIONS;

BORON COMPENSATION DOPING; CONVERSION EFFICIENCY; MICROCRYSTALLINE SILICON FILMS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; TANDEM SOLAR CELLS;

SILICON SOLAR CELLS;

EID: 0031354028     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0927-0248(97)00192-X     Document Type: Article

References (7)

1. M.J. Williams, C. Wang, G. Lucovsky, J. Non-Cryst. Solids 137&138 (1991) 737.
2. J. Meier, R. Fleuckiger, H. Keppner, A. Shah, Appl. Phys. Lett. 65 (1994) 860.
3. J. Meier, S. Dubail, R. Fischer, H. Keppner, A. Shah, Proc. 1st WCPEC, December 5-9 1994, Hawaii, 409.
4. N. Beck, J. Meier, J. Fric, Z. Remes, A. Poruba, R. Fuckiger, J. Pohl, A. Shah, M. Vanecek, J. Non-Cryst. Solids 198-200 (1996) 903.
5. K. Saitoh, N. Ishiguro, N. Yanagawa, H. Tanaka, M. Sadamoto, S. Fukuda, Y. Ashida, N. Fukuda, J. Non-Cryst. Solids 198-200 (1996) 1093.
6. K. Yoshida, Phil. Mag. B 53 (1986) 55.
7. A. Matsuda, J. Non-Cryst. Solids 59&60 (1983) 767.