Amorphous silicon photodetectors for silicon based optical waveguides

Solid State Phenomena

Volumn 54, Issue , 1997, Pages 45-49

  Maiello, G ^a   Balucani, M ^a   Bondarenko, V ^b   De Cesare, G ^a   La Monica, S ^a   Masini, G ^c   Ferrari, A ^a  

^a SAPIENZA UNIVERSITY OF ROME   (Italy)

^b BELARUSIAN STATE UNIVERSITY OF INFORMATICS AND RADIOELECTRONICS   (Belarus)

^c ROMA TRE UNIVERSITY   (Italy)

Author keywords

Amorphous Silicon; Photodetectors; Silicon Waveguides

Indexed keywords

AMORPHOUS SILICON; ANODIC OXIDATION; CHEMICAL VAPOR DEPOSITION; CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC CONTACTS; EQUIVALENT CIRCUITS; LIGHT ABSORPTION; OPTICAL WAVEGUIDES; REFRACTIVE INDEX; SILICON WAFERS;

OXIDIZED POROUS SILICON WAVEGUIDES (OPSWG); PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION (PECVD);

PHOTODETECTORS;

EID: 0031343670     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/ssp.54.45     Document Type: Article

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