Phonon scattering in heat-treated CZ-silicon

Materials Science Forum

Volumn 258-263, Issue PART 1, 1997, Pages 399-404

  Zeller, F ^a   Wurster, C ^a   Lassmann K ^a   Eisenmenger, W ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

Cz silicon; Oxide precipitates; Phonon spectroscopy

Indexed keywords

ABSORPTION; CRYSTAL GROWTH FROM MELT; EIGENVALUES AND EIGENFUNCTIONS; ELECTRIC EXCITATION; ELECTRON RESONANCE; ELECTRON TUNNELING; HEAT TREATMENT; MOLECULAR VIBRATIONS; OXYGEN; PHONONS; SPECTROSCOPY; TUNNEL JUNCTIONS;

GEOMETRIC EIGENVIBRATIONS; PHONON SPECTROSCOPY;

SEMICONDUCTING SILICON;

EID: 0031343466     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.258-263.399     Document Type: Article

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