Application of real-time spectroscopic ellipsometry for characterizing the structure and optical properties of microcrystalline component layers of amorphous semiconductor solar cells

Solar Energy Materials and Solar Cells

Volumn 49, Issue 1-4, 1997, Pages 135-142

  Koh, Joohyun ^a   Fujiwara, H ^a   Wronski, C R ^a,b   Collins, R W ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

^b The Pennsylvania State University   (United States)

Author keywords

Hydrogenated amorphous silicon (a Si:H); Microcrystalline silicon ( c Si:H); Real time spectroscopic ellipsometry; Solar cells

Indexed keywords

AMORPHOUS SILICON; DEPOSITION; ELLIPSOMETRY; FILM GROWTH; MORPHOLOGY; OPTICAL PROPERTIES; PLASMA APPLICATIONS; REAL TIME SYSTEMS; SEMICONDUCTOR DEVICE STRUCTURES; SPECTROSCOPY; SURFACE ROUGHNESS;

HYDROGENATED AMORPHOUS SILICON; MICROCRYSTALLINE SILICON; REAL TIME SPECTROSCOPIC ELLIPSOMETRY;

SILICON SOLAR CELLS;

EID: 0031339875     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0927-0248(97)00187-6     Document Type: Article

References (7)

1. R.W. Collins, J. Koh, Y. Lu, S. Kim, J.S. Burnham, C.R. Wronski, Proc. 25th IEEE Photovoltaics Specialists Conf., May 1996, Washington DC, USA, IEEE, 1996, p. 1035.
2. S. Guha, J. Yang, P. Nath, M. Hack, Appl. Phys, Lett. 49 (1986) 218.
3. I. An, Y.M. Li, C.R. Wronski, R.W. Collins, Phys. Rev. B 48 (1993) 4464.
4. G.D. Cody, B.G. Brooks, B. Abeles, Solar Energy Mater. 8 (1982) 231.
5. H.V. Nguyen, Y. Lu, S. Kim, M. Wakagi, R.W. Collins, Phys. Rev. Lett. 74 (1996) 3880.
6. L.-W. Wang, A. Zunger, J. Phys. Chem. 98 (1994) 2158, and references therein.
7. P. Lautenschlager, M. Garriga, L. Vina, M. Cardona, Phys. Rev. B 36 (1987) 4821.