Sputter deposition of SrTiO3 thin films for voltage tunable capacitors

Integrated Ferroelectrics

Volumn 17, Issue 1-4, 1997, Pages 247-256

  Raymond, Mark V ^a   Al Shareef, Husam N ^a   Dimos, Duane B ^a   Missert, Nancy ^a   Mueller, Carl H ^b   Galt, David ^b  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b Superconducting Core Technologies Inc   (United States)

Author keywords

Dielectric loss; Interdigital electrodes; Sputter deposition; SrTiO3 thin films; Tunable capacitors

Indexed keywords

ANNEALING; CAPACITORS; CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; ELECTRIC LOSSES; ELECTRODES; FILM GROWTH; PERMITTIVITY; SPUTTER DEPOSITION; THIN FILMS;

STRONTIUM TITANATE; TUNABLE CAPACITORS;

DIELECTRIC FILMS;

EID: 0031333555     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584589708012999     Document Type: Article

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