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Volumn 14, Issue 9, 1997, Pages 682-685
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Effect of nitrogen and hydrogen on the crystallization of nanocrystalline silicon nitrogen films
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Author keywords
[No Author keywords available]
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Indexed keywords
GLOW DISCHARGES;
HYDROGEN;
METALLIC FILMS;
NANOCRYSTALLINE SILICON;
NITROGEN;
SILICON COMPOUNDS;
CRYSTALLIZATION MECHANISMS;
GAS VOLUME;
GASES MIXTURE;
GROWTH PROCESS;
NANOCRYSTALLINES;
PROCESS MECHANISMS;
RF GLOW DISCHARGE;
VOLUME RATIO;
NANOCRYSTALS;
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EID: 0031317547
PISSN: 0256307X
EISSN: None
Source Type: Journal
DOI: 10.1088/0256-307X/14/9/012 Document Type: Article |
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Times cited : (5)
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References (6)
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