Characterization of nodular and thermal defects in hafnia/silica multilayer coatings using optical, photothermal, and atomic force microscopy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3244, Issue , 1997, Pages 475-483

  Stolz, C J ^a   Yoshiyama, J M ^a   Salleo, A ^a   Wu, Z L ^a   Green, John ^a   Krupka, R ^a  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

Atomic force microscopy; Coating defects; Hafnia silica multilayer coating; Laser damage morphology; Laser induced damage; Optical microscopy; Photothermal microscopy

Indexed keywords

ATOMIC FORCE MICROSCOPY; HAFNIUM COMPOUNDS; ION BEAMS; LASER DAMAGE; LIGHT ABSORPTION; MULTILAYERS; OPTICAL COATINGS; OPTICAL MICROSCOPY; SILICA;

PHOTOTHERMAL MICROSCOPY; THERMAL DEFECTS; THERMAL LENSING;

COATINGS;

EID: 0031289950     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.307008     Document Type: Conference Paper

References (19)

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3. Influence of defect shape on laser-induced damage in multilayer coatings
4. Characterization of defect geometeries in multilayer optical coatings
5. Correlation of damage threshold and surface geometry of nodular defects in HR coatings as determined by in-situ atomic force microscopy
6. Characterization of micron-sized, optical coating defects by photothermal deflection microscopy
7. Application of photothermal probe beam deflection technique for the high-sensitive characterization of optical thin films with respect to their optical, thermal and thermoelastic inhomogeneities
8. Surface contamination of bare substrates. Mapping of absorption and influence on deposited thin films
9. Characterization of optical coatings: Damage threshold / local absorption correlation
10. Failure characterization of nodular defects in multi-layer dielectric coatings
11. 2 Brewster's angle polarizers at 1064 nm
12. Morphologies of laser-induced damage in hafnia-silica multilayer mirror and polarizer coatings
13. A comparison of nodular defect seed geometries from different deposition techniques
14. Non-destructive evaluation of thin film coatings using a laser induced surface thermal lensing effect
15. Single beam interferometry of a thermal bump
16. New type of photothermal spectroscopic technique
17. High reflectors absorptance measurements by surface thermal lensing technique
18. Photothermal characterization of optical thin film coatings