A structure measurement of the CCD pixel by using the X-ray beam

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3114, Issue , 1997, Pages 230-240

  Tsunemi, H ^a   Yoshita, K ^a   Kitamoto, S ^a   Miyata, E ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

Charge coupled device; Gate structure; Moire pattern; Sub pixel resolution

Indexed keywords

CAMERAS; OPTICAL RESOLVING POWER; PARTICLE BEAMS; X RAYS;

X-RAY BEAMS;

CHARGE COUPLED DEVICES;

EID: 0031288792     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.278892     Document Type: Conference Paper

References (12)