Interaction of H(D) atoms with octadecylsiloxane self-assembled monolayers on the Si(100) surface

Langmuir

Volumn 13, Issue 24, 1997, Pages 6491-6496

  Kluth, G Jonathan ^a   Sung, Myung M ^a,b   Maboudian, Roya ^a  

^a University of California   (United States)

^b Department of Medical Research   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CROSSLINKING; DEPOSITION; ELECTRON ENERGY LOSS SPECTROSCOPY; ETCHING; HYDROGEN; REACTION KINETICS; SEMICONDUCTING SILICON; WATER;

ALKYLSILOXANE; HYDROGEN ABSTRACTION; SELF ASSEMBLED MONOLAYERS (SAM);

MONOLAYERS;

EID: 0031271949     PISSN: 07437463     EISSN: None     Source Type: Journal    
DOI: 10.1021/la970641g     Document Type: Article

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