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Volumn 63, Issue 5, 1996, Pages 415-419

A laser dry etch process for smooth continuous relief structures in InP

Author keywords

[No Author keywords available]

Indexed keywords

EXCIMER LASERS; LASER APPLICATIONS; SEMICONDUCTING INDIUM PHOSPHIDE; SEMICONDUCTOR DEVICE MANUFACTURE; SUBSTRATES;

PHOTOTHERMAL HEATING;

ETCHING;

EID: 0030283426 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/BF01571666 Document Type: Article

Times cited : (3)

References (15)

1
- 0000828797
- F.W. Ostermayer, Jr., P.A. Kohl, R.H. Burton: Appl. Phys. Lett. 43, 642 (1983)
- (1983) Appl. Phys. Lett. , vol.43 , pp. 642
- Ostermayer Jr., F.W.¹ Kohl, P.A.² Burton, R.H.³

2
- 0041719404
- D.J. Ehrlich, R.M. Osgood, Jr., T.F. Deutsch: Appl. Phys. Lett. 36, 698 (1980)
- (1980) Appl. Phys. Lett. , vol.36 , pp. 698
- Ehrlich, D.J.¹ Osgood Jr., R.M.² Deutsch, T.F.³

3
- 0024127297
- J.-L. Peyre, D. Riviere, C. Vannier, G. Villela: Electrical Communication 62, 222 (1988)
- (1988) Electrical Communication , vol.62 , pp. 222
- Peyre, J.-L.¹ Riviere, D.² Vannier, C.³ Villela, G.⁴

4
- 0023997824
- M. Takai, J. Tsuchimoto, J. Tokuda, H. Nakai, K. Gamo, S. Namba: Appl. Phys. A 45, 305 (1988)
- (1988) Appl. Phys. A , vol.45 , pp. 305
- Takai, M.¹ Tsuchimoto, J.² Tokuda, J.³ Nakai, H.⁴ Gamo, K.⁵ Namba, S.⁶

5
- 0024900808
- J. Meiler, R. Matz, D. Haarer: Appl. Surf. Sci. 43, 416 (1989)
- (1989) Appl. Surf. Sci. , vol.43 , pp. 416
- Meiler, J.¹ Matz, R.² Haarer, D.³

6
- 0001864868
- M. Rothschild, D.J. Ehrlich: J. Vac. Sci. Technol. B 6, 1 (1988)
- (1988) J. Vac. Sci. Technol. B , vol.6 , pp. 1
- Rothschild, M.¹ Ehrlich, D.J.²

7
- 0023844156
- L. Ding, Q. Mingxin, K. Zhong: J. Electr. Mat. 17, 29 (1988)
- (1988) J. Electr. Mat. , vol.17 , pp. 29
- Ding, L.¹ Mingxin, Q.² Zhong, K.³

8
- 0005399262
- V.M. Donnelly, T.R. Hayes: Appl. Phys. Lett. 57, 701 (1990)
- (1990) Appl. Phys. Lett. , vol.57 , pp. 701
- Donnelly, V.M.¹ Hayes, T.R.²

9
- 4143149318
- R. Matz, J. Meiler, D. Haarer: Mat. Res. Soc. Symp. Proc. 158, 307 (1990)
- (1990) Mat. Res. Soc. Symp. Proc. , vol.158 , pp. 307
- Matz, R.¹ Meiler, J.² Haarer, D.³

10
- 0007915722
- Q.Z. Qin, Y.L. Li, P.H. Lu, Z.J. Zhang, Z.K. Jin, Q.K. Zheng: J. Vac. Sci. Technol. B 10, 201 (1992)
- (1992) J. Vac. Sci. Technol. B , vol.10 , pp. 201
- Qin, Q.Z.¹ Li, Y.L.² Lu, P.H.³ Zhang, Z.J.⁴ Jin, Z.K.⁵ Zheng, Q.K.⁶

11
- 0027905510
- R. Heydel, R. Matz, W. Göpel: Appl. Surf. Sci. 69, 38 (1993)
- (1993) Appl. Surf. Sci. , vol.69 , pp. 38
- Heydel, R.¹ Matz, R.² Göpel, W.³

12
- 0343259933
- R. Matz, R. Heydel, W. Göpel: Appl. Phys. Lett. 63, 1137 (1993)
- (1993) Appl. Phys. Lett. , vol.63 , pp. 1137
- Matz, R.¹ Heydel, R.² Göpel, W.³

13
- 0009056339
- New Series, Group III, Subvol. a, Springer, Berlin, Heidelberg
- Landolt-Börnstein, Numerical Data and Functional Relationships in Science and Technology, Physics of Group IV Elements and III-V Compounds; New Series, Group III, Vol. 17, Subvol. a, (Springer, Berlin, Heidelberg, 1982) p. 572
- (1982) Numerical Data and Functional Relationships in Science and Technology, Physics of Group IV Elements and III-V Compounds , vol.17 , pp. 572
- Landolt-Börnstein¹

14
- 5544221586
- ed. by J.M. Poate, J.W. Mayer, Academic Press, New York
- P. Baeri, S.U. Campisano: Laser Annealing of Semiconductors, ed. by J.M. Poate, J.W. Mayer (Academic Press, New York, 1982) p. 77
- (1982) Laser Annealing of Semiconductors , pp. 77
- Baeri, P.¹ Campisano, S.U.²

15
- 84923739172
- V.M. Donnelly, V.R. McCrary, D. Brasen: Mat. Res. Soc. Symp. Proc. 75, 567 (1987)
- (1987) Mat. Res. Soc. Symp. Proc. , vol.75 , pp. 567
- Donnelly, V.M.¹ McCrary, V.R.² Brasen, D.³

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