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Volumn 308-309, Issue 1-4, 1997, Pages 279-283
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Investigation of distribution of defects and impurities in boron-doped CVD diamond film by cathodoluminescence spectroscopy
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Author keywords
Boron; Cathodoluminescence; CVD diamond; Edge emission; Vacancy
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Indexed keywords
BAND STRUCTURE;
CATHODOLUMINESCENCE;
CHEMICAL VAPOR DEPOSITION;
CRYSTAL DEFECTS;
CRYSTAL IMPURITIES;
FILM GROWTH;
INTERFACES (MATERIALS);
SEMICONDUCTING BORON;
SUBSTRATES;
EDGE EMISSION;
MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION;
DIAMOND FILMS;
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EID: 0031248797
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(97)00414-8 Document Type: Article |
Times cited : (14)
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References (14)
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