A comparative study of refractory metal nitridation in an NH3 ambient

Thin Solid Films

Volumn 308-309, Issue 1-4, 1997, Pages 410-414

  Zou, Y L ^a   Alford, T L ^a   Zeng, Y ^a   Laursen, T ^a   Ullrich, B M ^a,b  

^a ARIZONA STATE UNIVERSITY   (United States)

^b School of Chemical and Molecular Engineering   (United States)

Author keywords

Nitridation; Passivation; Refractory metal; Silver

Indexed keywords

AMMONIA; CHROMIUM; ELECTRIC CONDUCTIVITY MEASUREMENT; INTERFACES (MATERIALS); METALLIC SUPERLATTICES; NITRIDING; PASSIVATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILVER; THIN FILMS; TITANIUM; X RAY CRYSTALLOGRAPHY;

AUGER DEPTH PROFILING;

REFRACTORY METALS;

EID: 0031248471     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00595-6     Document Type: Article

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