Microstructural investigation of as-deposited and heat-treated CVD Al2O3

Surface and Coatings Technology

Volumn 94-95, Issue , 1997, Pages 76-81

  Larsson, A ^a   Halvarsson, M ^a   Vuorinen, S ^b  

^a CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

^b SECO TOOLS AB   (Sweden)

Author keywords

Aluminium oxide; As deposited; CVD; Heat treatment

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRACKS; CRYSTAL MICROSTRUCTURE; DISLOCATIONS (CRYSTALS); GRAIN BOUNDARIES; GRAIN SIZE AND SHAPE; HEAT TREATMENT; PHASE TRANSITIONS; PROTECTIVE COATINGS; TRANSMISSION ELECTRON MICROSCOPY;

STACKING SEQUENCES;

ALUMINA;

EID: 0031248195     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00479-9     Document Type: Article

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