A cleaning model for removal of particles due to laser-induced thermal expansion of substrate surface

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 36, Issue 10 PART A, 1997, Pages

  Lu, Yong Feng ^a   Song, Wen Dong ^a   Ye, Kai Dong ^a   Lee, Yuan Ping ^a   Chan, Daniel S H ^a   Low, Teck Seng ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Adhesion force; Cleaning force; Cleaning model; Cleaning threshold; Laser cleaning; Particle removal; Quartz particle; Silicon substrate

Indexed keywords

ADHESION; LASER BEAM EFFECTS; MATHEMATICAL MODELS; PARTICLES (PARTICULATE MATTER); PULSED LASER APPLICATIONS; QUARTZ; SILICON; SUBSTRATES; THERMAL EXPANSION; VAN DER WAALS FORCES;

LASER FLUENCE;

SURFACE CLEANING;

EID: 0031247453     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.l1304     Document Type: Article

References (13)

1. K. Imen, S. J. Lee and S. D. Allen: Appl. Phys. Lett. 58 (1991) 203.
2. A. C. Tam, W. P. Leung, W. Zapka and W. Ziemlich: J. Appl. Phys. 71 (1992) 3515.
3. J. D. Kelley and F. E. Hovis: Microelectron. Eng. 20 (1993) 159.
4. Y. F. Lu, W. D. Song, M. H. Hong, B. S. Teo, T. C. Chong and T. S. Low: J. Appl. Phys. 80 (1996) 499.
5. K. Mann, B. Wolff-Rottke and F. Muller: Appl. Surf. Sci. 98 (1996) 463.
6. K. L. Mittal: Particles on Surfaces (Marcel Dekker Inc., New York, 1995) pp. 1 & 33.
7. K. L. Mittal: Particles on Surfaces (Plenum Press, New York, 1988) Vol. 1, pp. 77, 129 & 179.
8. J. N. Israelachvili: Intermolecular and Surface Forces (Academic Press, London, 1985) p. 146.
9. E. D. Palik: Handbook of Optical Constants of Solids (Academie Press, Orlando, 1985) pp. 390-397.
10. Y. S. Touloukian: Thermophysical Properties of Matter, The TPRC Series (IFI/Plenum, New York, 1978) Vol. 1, p. 339; Vol. 4, pp. 204-206; Vol. 13, p. 154.
11. Y. S. Touloukian: Thermophysical Properties of Matter, The TPRC Series (IFI/Plenum, New York, 1978) Vol. 1, p. 339; Vol. 4, pp. 204-206; Vol. 13, p. 154.
12. Y. S. Touloukian: Thermophysical Properties of Matter, The TPRC Series (IFI/Plenum, New York, 1978) Vol. 1, p. 339; Vol. 4, pp. 204-206; Vol. 13, p. 154.
13. H. F. Wolf: Silicon Semiconductor Data (Pregamon Press, Oxford, 1969) pp. 3 & 122.