Antenna-coupled bolometer with a micromachined-beam thermal link

Applied Physics Letters

Volumn 71, Issue 16, 1997, Pages 2361-2363

  Osterman, D P ^a   Patt, R ^a   Hunt, R ^a   Peterson, J B ^b  

^a HYPRES INC   (United States)

^b CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; ANTENNAS; FIELD EFFECT TRANSISTORS; MILLIMETER WAVES; NIOBIUM; RESISTORS; SEMICONDUCTING SILICON; SILICON NITRIDE; SUPERCONDUCTING MATERIALS; SUPERCONDUCTING TRANSITION TEMPERATURE; THERMAL CONDUCTIVITY; THERMOMETERS;

AMORPHOUS SILICON NITRIDE; ANTENNA COUPLED BOLOMETER; COSMIC RAY HEATING; ELECTROTHERMAL FEEDBACK; MICROMACHINED BEAM THERMAL LINK; PHONON FLUCTUATION; PHOTON FLUCTUATION; THERMAL CAPACITANCE; THERMAL CONDUCTANCE;

BOLOMETERS;

EID: 0031244864     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.120028     Document Type: Article

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