Composite infrared bolometers with Si3N4 micromesh absorbers

Applied Optics

Volumn 36, Issue 4, 1997, Pages 765-771

  Mauskopf, P D ^a   Bock, J J ^a,b   Castillo, H Del ^b   Holzapfel, W L ^a   Lange, A E ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^b CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Infrared bolometers; Micromesh; Silicon nitride

Indexed keywords

EID: 0000273982     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.36.000765     Document Type: Article

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