Effects of γ-ray irradiation on photoluminescence spectra from Si-rich silicon oxide

Materials Research Bulletin

Volumn 32, Issue 10, 1997, Pages 1427-1433

  Ma, S Y ^a   Zhang, B R ^a   Qin, G G ^a,d   Ma, Z C ^b   Zong, W H ^b   Meng, X T ^c  

^a PEKING UNIVERSITY   (China)

^b 13th Inst Min of Electron Indust   (China)

^c TSINGHUA UNIVERSITY   (China)

^d INTERNATIONAL CENTRE FOR MATERIALS PHYSICS   (China)

Author keywords

A. oxides; A. thin films; B. sputtering; D. defects; D. luminescence

Indexed keywords

ANNEALING; DEFECTS; EMISSION SPECTROSCOPY; GAMMA RAYS; MAGNETRON SPUTTERING; PHOTOEMISSION; PHOTOLUMINESCENCE; SEMICONDUCTING SILICON COMPOUNDS; SILICA; SUBSTRATES; THIN FILMS;

PHOTOLUMINESCENCE SPECTROSCOPY;

SEMICONDUCTING FILMS;

EID: 0031244813     PISSN: 00255408     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0025-5408(97)00122-0     Document Type: Article

References (20)

1. L.T. Canham, Appl. Phys. Lett. 57, 1146-1148 (1990).
2. F. Koch, V. Petrova-Koch, T. Muschik, A. Nikolov, and V. Garrilenko, Mater. Res. Soc. Symp. Proc. 283, 197 (3993).
3. M.S. Brandt, H.D. Fuchs, M. Stutzmann, J. Weber, and M. Cardona, Solid State Commun. 81, 307 (1992).
4. C. Tsai, K.-H. Li, D.S. Kinosky, R.-Z. Qian, T.-C. Hsu, J.Y. Irby, S.K. Banerjee, A.F. Tasch, and J.C. Campbell, Appl. Phys. Lett. 60, 1700 (1992).
5. S.M. Prokes, O.J. Glembocki, V.M. Bermudez, R. Kaplan, L.E. Friedsoft, and P.C. Searson. Phys. Rev. B 45, 13788 (1992).
6. S.M. Prokes, Appl. Phys. Lett. 62, 3244 (1993).
7. G.G. Qin and Y.Q. Jia, Solid State Commun. 86, 559 (1993).
8. J. Lin, L.Z. Zhang, Y.M. Huang, B.R. Zhang, and G.G. Qin, Appl. Phys. Lett. 64, 3282 (1994).
9. J.Q. Duan, G.Q. Yao, H.Z. Song, B.R. Zhang, and G.G. Qin, J. Appl. Phys. 78, 478 (1995).
10. D.W. Cooke, B.L. Bennett, E.H. Farnum, W.L. Hults, K.E. Sickafus, J.F. Smith, J.L. Smith, T.N. Taylor, P. Tiwari, and A.M. Portis, Appl. Phys. Lett. 68, 1665 (1996)
11. G.G. Qin, H.Z. Song, B.R. Zhang, J. Lin, J.Q. Duan, and G.Q. Yao, Phys. Rev. B 54, 2548 (1996).
12. G.G. Qin, J. Lin, J.Q. Duan, and G.Q. Yao, Appl. Phys. Lett. 69, 1689 (1996).
13. G.G. Qin, X.S. Liu, S.Y. Ma, J. Lin, G.Q. Yao, X.Y. Lin, and K.X. Lin, in preparation.
14. H. Takagi, H. Ogawa, Y. Yamazaki, et al., Appl. Phys. Lett. 56, 2379 (1990).
15. S. Schuppler, S.L. Friedman, M.A. Macus, D.L. Adler, Y.H. Xie, F.M. Ross, Y.J. Chabal, T.D. Harris, E.E. Brus, W.L. Brown, E.E. Chaban, P.F. Szajowski, S.B. Christman, and P.H. Citrin, Phys. Rev. B 52, 4910 (1995).
16. H. Morisaki, H. Hashimoto, F.W. Ping, H. Nozawa, and H. Ono, J. Appl. Phys. 74, 2977 (1993).
17. K.S. Min, K.V. Shcheglov, C.M. Yang, H.A. Atwater, M.L. Brongersma, and A. Polman, Appl. Phys. Lett. 68, 2511 (1996).
18. C. Itoh, T. Suzu, and N. Itoh, Phys. Rev. B 41, 3794 (1990).
19. H. Nishikawa, T. Shiroyama, R. Nakamura, Y. Ohiki, K. Nagasawa, and Y. Hama, Phys. Rev. B 45, 586 (1992).
20. Y.P. Varshni, Physica 34, 149 (1967).