Micromachined thermocouple microwave detector in CMOS technology

Midwest Symposium on Circuits and Systems

Volumn 1, Issue , 1996, Pages 273-276

  Milanovic, Veljko ^a   Gaitan, Michael ^a   Zaghloul, Mona E ^a  

^a GEORGE WASHINGTON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRIC NETWORK ANALYZERS; ELECTRIC VARIABLES MEASUREMENT; ETCHING; FREQUENCIES; MICROMACHINING; MICROWAVE DEVICES; THERMOCOUPLES; THERMOELECTRICITY;

THERMOCOUPLE MICROWAVE POWER DETECTOR; THERMOELECTRIC POWER SENSORS;

SENSORS;

EID: 0030362102     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)