Innovative evaluation method for shearing interferograms

Optics Communications

Volumn 141, Issue 5-6, 1997, Pages 254-258

  Loheide, S ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Evaluation method; Image formation; Interference; Shearing interferometer; Wavefront aberrations

Indexed keywords

ABERRATIONS; FOURIER OPTICS; IMAGE PROCESSING; INTERFEROMETERS; LIGHT INTERFERENCE; OPTICAL TRANSFER FUNCTION; WAVEFRONTS;

FOURIER FILTERING; SHEARING INTERFEROGRAMS;

INTERFEROMETRY;

EID: 0031237230     PISSN: 00304018     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0030-4018(97)00253-8     Document Type: Article

References (37)

1. V. Ronchi, Riv. Ottica Mecc. Precis. 2 (1923) 9.
2. W.J. Bates, Proc. Phys. Soc. 59 (1947) 940.
3. V. Ronchi, Appl. Optics 3 (1964) 437.
4. M. Born, E. Wolf, Principles of Optics (Pergamon Press, Oxford, 6th (corrected) Ed., 1989)
5. J.B. Saunders, J. Res. NBS 65B (1961) 239.
6. M.V.R.K. Murty, Appl. Optics 3 (1964) 531.
7. P. Hariharan, Appl. Optics 14 (1975) 1056.
8. A. Lohmann, O. Bryngdahl, J. Opt. Soc. Am. 6 (1967) 1934.
9. O. Bryngdahl, J. Opt. Soc. Am. 58 (1968) 865.
10. S. Yokozeki, T. Suzuki, Appl. Optics 10 (1971) 1575.
11. S. Yokozeki, T. Suzuki, Appl. Optics 10 (1971) 690.
12. J. Schwider, Appl. Optics 23 (1984) 4403.
13. J. Schwider, Progr. Optics 28 (1990) 271.
14. I. Weingärtner, M. Schulz, Proc. SPIE 1781 (1992) 266.
15. M.P. Rimmer, J.C. Wyant, Appl. Optics 14 (1975) 142.
16. J. Primot, Appl. Optics 32 (1993) 6242.
17. S. Bäumer, Quantitative Mikro-Meßtechnik mit einem Lateral Shearing Interferometer, Ph.D. Thesis, Optics Institute of Berlin Technical University, Berlin (1995)
18. I. Weingärtner, H. Stenger, Optik 70 (1985) 124.
19. M. Servin, D. Malacara, J.L. Marroquin, Appl. Optics 35 (1996) 4343.
20. G. Harbers, P.J. Kunst, G.W.R. Leibbrandt, Appl. Optics 35 (1996) 6162.
21. G.W.R. Leibbrandt, G. Harbers, P.J. Kunst, Appl. Optics 32 (1996) 6151.
22. F. Guse, Auswertung von Messungen mit Optimierungsverfahren - demonstriert an Interferometrie und Ellipsometrie, Ph.D. Thesis (submitted to the Optics Institute of Berlin Technical University) Berlin (1996).
23. D. Dutton, A. Cornejo, M. Latta, Appl. Optics 7 (1968) 125.
24. K.R. Freischlad, C.L. Koliopoulos, J. Opt. Soc. Am. A 3 (1986) 1852.
25. G. Schulz, Appl. Optics 32 (1993) 1055.
26. K.-E. Elßner, A. Vogel, J. Grzanna, G. Schulz, Appl. Optics 33 (1994) 2437.
27. M.P. Rimmer, Appl. Optics 13 (1974) 623.
28. B.R. Hunt, J. Opt. Soc. Am. 69 (1979) 393.
29. R.L. Prost, C.K. Rushforth, B.S. Baxter, Appl. Optics 18 (1979) 2056.
30. W.H. Southwell, J. Opt. Soc. Am. 70 (1980) 998.
31. X. Tian, M. Itoh, T. Yatagai, Appl. Optics 34 (1995) 7213.
32. K. Freischlad, Appl. Optics 26 (1987) 4053.
33. M. Takeda, H. Ina, S. Kobayashi, J. Opt. Soc. Am. 72 (1982) 156.
34. C. Roddier, F. Roddier, Appl. Optics 26 (1987) 1668.
35. D.J. Bone, Appl. Optics 30 (1991) 3627.
36. P.Z. Takacs, S.K. Feng, E.L. Church, S. Qian, W. Liu, Proc. SPIE 966 (1988) 354.
37. A. Menikoff, J. Opt. Soc. Am. A 6 (1989) 1027.