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Volumn 144, Issue 9, 1997, Pages 3237-3242
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Rapid thermal processing of screen printed ohmic contacts
a a a b b c
a
AMRL
(United States)
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Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINUM;
ANNEALING;
ELECTRIC PROPERTIES;
MECHANICAL PROPERTIES;
METALLIC FILMS;
PHOTONS;
SCREEN PRINTING;
SEMICONDUCTING SILICON;
SEMICONDUCTOR DEVICES;
SILVER;
SPECTROSCOPY;
SURFACES;
LAMP CONFIGURATION;
PHOTOEFFECT;
PHOTON SPECTRUM;
RAPID THERMAL PROCESSING;
OHMIC CONTACTS;
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EID: 0031235295
PISSN: 00134651
EISSN: None
Source Type: Journal
DOI: 10.1149/1.1837989 Document Type: Article |
Times cited : (7)
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References (15)
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