Preparation and properties of (Pb, Ca)TiO3 thin films by multiple-cathode sputtering

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 9 SUPPL. B, 1997, Pages 5825-5828

  Maiwa, Hiroshi ^a   Ichinose, Noboru ^b  

^a SHONAN INSTITUTE OF TECHNOLOGY   (Japan)

^b WASEDA UNIVERSITY   (Japan)

Author keywords

(Pb, Ca)TiO3; Ferroelectric thin films; Leakage current; Low substrate temperature; Multiple cathode sputtering; Remanent polarization

Indexed keywords

LEAD COMPOUNDS; MAGNESIA; MAGNETRON SPUTTERING; PERMITTIVITY; PEROVSKITE; PLATINUM; POLARIZATION; SILICA; SUBSTRATES; THERMAL EFFECTS; THIN FILMS; TITANIUM;

LEAD CALCIUM TITANATE; MULTIPLE CATHODE SPUTTERING;

FERROELECTRIC MATERIALS;

EID: 0031222158     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.5825     Document Type: Article

References (11)

1. J. F. Scott and C. A. Paz de Araujo: Science 246 (1989) 1400.
2. P. Muralt, M. Kohhli, T. Maeder, A. Kholkin, K. Brooks, N. Setter and R. Luthier: Sens. Actuators A 48 (1995) 157.
3. M. Shimizu, M. Fujimoto, T. Katayama, T. Shiosaki, K. Nakaya, M. Fukagawa and E. Tanikawa: Mater. Soc. Symp. Proc. 310 (1993) 255.
4. T. Asakusa, K. Ishikawa, A. Sato and M. Okada: Jpn. J. Appl. Phys. 35 (1996) 4886.
5. E. Sawaguchi: J. Phys. Soc. Jpn. 11 (1956) 1998.
6. K. Okazaki: Ferroelectrics 41 (1982) 77.
7. Y. Yamashita, K. Yokoyama, H. Honda and T. Takahash: Proc. 3rd Meet. Ferroelectric Materials and Their Applications, Kyoto, 1981, Jpn. J. Appl. Phys. 20 (1981) Suppl. 20-4 , p. 183.
8. E. Yamaka, H. Watanabe, H. Kimura and H. Ohkuma: J. Vac. Sci. Technol. A 6 (1988) 2921.
9. A. L. Kholkin, M. L. Calzada, P. Ramos, J. Mendiola and N. Setter: Appl. Phys. Lett. 69 (1996) 3602.
10. H. Maiwa, N. Ichinose and K. Okazaki: Jpn. J. Appl. Phys. 31 (1992) 3029.
11. H. Maiwa, N. Ichinose and K. Okazaki: Jpn. J. Appl. Phys. 33 (1994) 6227.