Uncertainty estimation for multiposition form error metrology

Precision Engineering

Volumn 21, Issue 2-3, 1997, Pages 72-82

  Estler, W Tyler ^a   Evans, Chris J ^a   Shao, L Z ^b  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b Tucson Optical Research Corporation   (United States)

Author keywords

Difference techniques; Dimensional metrology; Error separation; Multistep methods; Optical figure metrology; Roundness; Spindle errors

Indexed keywords

ERROR ANALYSIS; ESTIMATION; GEOMETRY; OPTICS; PRECISION ENGINEERING; PROBABILITY;

ERROR METROLOGY; OPTICAL FIGURE METROLOGY; ROUNDNESS; SPINDLE ERROR; UNCERTAINTY ESTIMATION;

MEASUREMENT ERRORS;

EID: 0031221905     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0141-6359(97)00058-5     Document Type: Article

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