Modification of the outgassing rate of stainless steel surfaces by plasma immersion ion implantation

Surface and Coatings Technology

Volumn 93, Issue 2-3, 1997, Pages 318-326

  Garke, B ^a   Edelmann, Chr ^a   Gunzel R ^b   Brutscher, J ^b  

^a OTTO VON GUERICKE UNIVERSITY   (Germany)

^b INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

Ion implantation; Stainless steel; Surface structure; Surface topography; Vacuum measurement

Indexed keywords

DEGASSING; ION BOMBARDMENT; ION IMPLANTATION; MATHEMATICAL MODELS; NITROGEN; OXYGEN; PLASMA APPLICATIONS; SURFACE STRUCTURE; VACUUM; X RAY PHOTOELECTRON SPECTROSCOPY;

ELECTRON SPECTROSCOPY FOR CHEMICAL ANALYSIS (ESCA); PLASMA IMMERSION ION IMPLANTATION (PIII); SURFACE TOPOGRAPHY;

STAINLESS STEEL;

EID: 0031220122     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00068-6     Document Type: Article

References (10)

1. J.R. Conrad, J.L. Radtke, R.A. Dodd, F.J. Worzala, N.C. Tran, J. Appl. Phys. 62 (1987) 4591.
2. J.R. Conrad, R.A. Dodd, S. Han, M. Madapura, J. Scheuer, K. Sridharan, F.J. Worzala, J. Vac. Sci. Technol. A8 (1990) 3146.
3. G. Böhm, R. Günzel, J. Vac. Sci. Technol. B 12 (1994) 821.
4. R.W. Thomae, B. Seiler, H. Bender, J. Brutscher, R. Günzel, J. Halder, H. Klein, J. Müller, M. Sarstedt, Nucl. Instrum. Methods Phys. Rev. B 99 (1995) 569.
5. J. Brutscher, R. Günzel, W. Möller, Plasma Sources Sci. Technol. 5 (1996) 54.
6. J.R. Conrad, S. Baumann, R. Fleming, G.P. Meeker, J. Appl. Phys. 65 (1989) 2143.
7. C. Edelmann, Vakuum-Technik 38 (1989) 223.
8. N. Schindler and D. Schleussner, Frühjahrstagung des AK FKP bei der DPG, 25.-29.03.1996 Regensburg.
9. N. Schindler, D. Schleußner, Chr. Edelmann, Vacuum 47 (1996) 351.
10. M. Wutz, H. Adam and W. Walcher, Theorie und Praxis der Vakuumtechnik. Vieweg, Braunschweig, 1992, pp. 71 and 531.